Semiconductor Wafer Analyzer
- Excitation wavelength 375 nm to 810 nm
- Emission wavelength selection with easily exchangeable filters
- Detector options: PMT or MCP-PMT
- Data acquisition based on Time-Correlated Single Photon Counting (TCSPC)
- Integrated laser power meter
The WaferCheck 150 system is a complete and easy to use system for Time-Resolved Photoluminescence (TRPL) measurements. TRPL is a very powerful tool for the contact-free characterization and investigation of semiconductor materials. It is non-destructive and involves only light as a probe. It can be used for everything from raw materials to in-process intermediates to finished devices. These capabilities qualify TRPL as a valuable analysis tool for research, testing and quality control.
Measurement of electron-hole recombination rates
The application of TRPL in the semiconductor industry is focused mainly on the measurement and identification of electron-hole recombination rates. The length of time a photo-excited carrier can remain in the conduction (or valence) band is an important parameter directly related to material quality and device performance. The luminescence lifetime decay value is an indicator for characterizing semiconductor materials for use in e.g. photovoltaic devices (solar cells), photodetectors, LEDs, etc.
Designed for 10 cm wafer
The WaferCheck 150 is designed for 10 cm wafers (other sizes on request), which are placed on a manually rotatable table that allows to measure at different spots of the wafer. The system uses miniaturized picosecond pulsed light sources along with electronics for recording fluorescence decays by means of Time-Correlated Single Photon Counting (TCSPC). The emission is spectrally filtered by different high quality filters. As standard detector a fast and reliable photomultiplier (PMT) of the PMA series allows detection of decay times down to 60 ps. Even faster decays down to 10 ps can be resolved using a Multichannel Plate Photomultiplier (MCP-PMT) as detector. All data acquisition functions of the WaferCheck 150 are controlled by an easy to use software for Windows. Data analysis is done using FluoFit, which allows reconvolution of complex decays, saving of results and parameters, etc.
Detailed specifications are included in the datasheet.
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All Information given here is reliable to our best knowledge. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications and external appearances are subject to change without notice.
The WaferCheck 150 is a compact system for TRPL measurements. It can be used to study various samples and perform several applications, including:
- Time-Resolved Photoluminescence (TRPL)
- Online semiconductior process analysis and quality control
- Time response characterization of optoelectronic devices
- LEDs, OLEDs