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Fluorescence Spectrometers

Wafercheck 150

Semiconductor Wafer Analyzer

  • Excitation wavelength 375 nm to 810 nm
  • Emission wavelength selection with easily exchangeable filters
  • Detector options: PMT or MCP-PMT
  • Data acquisition based on Time-Correlated Single Photon Counting (TCSPC)
  • Integrated laser power meter

The WaferCheck 150 system is a complete and easy to use system for Time-Resolved Photoluminescence (TRPL) measurements. TRPL is a very powerful tool for the contact-free characterization and investigation of semiconductor materials. It is non-destructive and involves only light as a probe. It can be used for everything from raw materials to in-process intermediates to finished devices. These capabilities qualify TRPL as a valuable analysis tool for research, testing and quality control.

Measurement of electron-hole recombination rates

The application of TRPL in the semiconductor industry is focused mainly on the measurement and identification of electron-hole recombination rates. The length of time a photo-excited carrier can remain in the conduction (or valence) band is an important parameter directly related to material quality and device performance. The luminescence lifetime decay value is an indicator for characterizing semiconductor materials for use in e.g. photovoltaic devices (solar cells), photodetectors, LEDs, etc.

Designed for 10 cm wafer

Wafercheck 150 - Detailed view of sample spaceThe WaferCheck 150 is designed for 10 cm wafers (other sizes on request), which are placed on a manually rotatable table that allows to measure at different spots of the wafer. The system uses miniaturized picosecond pulsed light sources along with electronics for recording fluorescence decays by means of Time-Correlated Single Photon Counting (TCSPC). The emission is spectrally filtered by different high quality filters. As standard detector a fast and reliable photomultiplier (PMT) of the PMA series allows detection of decay times down to 60 ps. Even faster decays down to 10 ps can be resolved using a Multichannel Plate Photomultiplier (MCP-PMT) as detector. All data acquisition functions of the WaferCheck 150 are controlled by an easy to use software for Windows. Data analysis is done using FluoFit, which allows reconvolution of complex decays, saving of results and parameters, etc.

Detailed specifications are included in the datasheet.

Mode of operation
  • Time-Correlated Single Photon Counting (TCSPC)
  • Multi-Channel Scaling (MCS)
Lifetime range
  • 50 ps to 10 µs with PMT detector and TCSPC electronics
  • < 10 ps to 10 µs with MCP-PMT detector, TCSPC electronics, and suitable laser
  • Up to several 100 ms with PMT and MCS electronics
Excitation sources
  • Picosecond pulsed diode lasers or LEDs with repetition rates up to 80 MHz, common driver unit
Spectral separation
  • high quality optical filters
  • Photomultiplier Tubes (PMTs) with different spectral ranges between 200 nm and 820 nm
  • Microchannel Plate Photomultiplier Tubes (MCP-PMTs) with various spectral ranges between 185 nm and 850 nm
  • Easy to use, comprehensive, Windows based data acquisition and analysis software
  • Lifetime analysis based on numerical reconvolution procedure, up to 4th exponential decay functions, lifetime distributions, global analysis, rigorous error analysis

All Information given here is reliable to our best knowledge. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications and external appearances are subject to change without notice.

The WaferCheck 150 is a compact system for TRPL measurements. It can be used to study various samples and perform several applications, including: